Methods for Plasma Pre-Treatment and Monitoring of Web Material Condition During Vacuum Processing: Aimcal RTR 2019 Myrtle Beach, SC, USA

摘要

Two-electrode discharge; One electrode is grounded, one is live (positive pulse V+); Magnets create a magnetic field trap over a grounded electrode. The web/substrate to be treated is kept in contact with ground; A (positive) pulsed mode is used for the discharge, for improved effectiveness in etching the web surface; Due to the pulsed nature even dielectric layers on substrate could be removed by this method.