Roll-to-Roll Integrated Deposition, Lithography, and Etching on Flexible Corning Willow Glass for Electronics Device Fabrication - (ppt)

摘要

· Flexible Corning Willow Glass · The Center for Advanced Microelectronics Manufacturing · Fabrication on the Rolls · Multi-layer Alignment and Registration Analysis · Double Sided Alignment and Patterning · Reactive Ion Etching · Etching Titanium · Etching Glass · Fabrication of Devices using Wafer on Web Technique: · TFTs · Interposer Substrates · ITO and Copper Mesh Antennas · Anti-reflective coatings · Conclusions