Numerical Modeling of Polarization Gratings by Rigorous Coupled Wave Analysis

摘要

We report on the numerical analysis of polarization gratings (PGs) and study their general diffraction properties by using the Rigorous Coupled Wave Analysis (RCWA) method. With this semi-analytical method, we can perform rigorous simulation without paraxial approximation and have a complete understanding of diffraction behavior of PGs, including those with complex twisted layers. We first adapt the formulation of conventional RCWA to simulate grating made by anisotropic material, as appropriate for the PG profile. We then validate our RCWA method by comparing its result with that given by finite-difference time-domain (FDTD) method. Diffraction characteristics including the spectral response, angular response, and polarization dependence are investigated. A comparison of the stability and computation performance between the two methods is also briefly discussed.