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Implementation of rigorous coupled wave analysis having improved efficiency for characterization

机译:实施严格的耦合波分析以提高表征效率

摘要

Improved optical characterization is provided by organizing the optical modeling calculations such that incident radiation parameters (e.g., wavelength) are varied in the outermost loop of any modeling run. By completing calculations for all combinations of structure parameters at one wavelength before moving to the next wavelength, calculation efficiency can be greatly improved. In particular, with this approach it is not necessary to cache (or re-compute) intermediate results pertaining to different wavelengths, in contrast to conventional approaches. Further improvements in efficiency can be obtained by organizing reflectance calculations such that for any layer Ll, stored intermediate results pertaining to layers below Ll can be used to calculate optical response as parameters for Ll and layers above Ll are varied. Similarly, transmittance calculations can be organized such that for any layer Ll, stored intermediate results pertaining to layers above Ll can be used to calculate optical response as parameters for Ll and layers below Ll are varied.
机译:通过组织光学建模计算来提供改进的光学特性,以使入射辐射参数(例如,波长)在任何建模运行的最外层回路中变化。通过在移至下一个波长之前完成一个波长下所有结构参数组合的计算,可以大大提高计算效率。特别地,与常规方法相比,利用这种方法,不必缓存(或重新计算)与不同波长有关的中间结果。通过组织反射率计算,可以进一步提高效率,从而对于任何L l 层,可以将与L l 以下层有关的存储中间结果用于计算光学响应,如下所示: L l 和L l 上方的图层的参数各不相同。类似地,可以组织透射率计算,以便对于L l 的任何层,可以使用与L l 之上的层有关的存储中间结果来计算光学响应,作为L l的参数。 Sub> l 和L l 以下的层是变化的。

著录项

  • 公开/公告号US7756677B1

    专利类型

  • 公开/公告日2010-07-13

    原文格式PDF

  • 申请/专利权人 GUOGUANG LI;

    申请/专利号US20070897093

  • 发明设计人 GUOGUANG LI;

    申请日2007-08-28

  • 分类号G06F3/01;

  • 国家 US

  • 入库时间 2022-08-21 18:51:37

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