High power DUV lasers for material processing

摘要

A frontier in laser machining has been required by material processing in DUV region because it is hard to get high power solid-state lasers in this spectral region. DUV excimer lasers are the only solution, and now the time has come to examine the new applications of material processing with DUV excimer lasers. The excimer lasers at 193nm and 248nm have been used in the semiconductor manufacturing for long years, and have field-proven stability and reliability. The high photon energy of 6.4 eV at 193nm is expected to interact directly with the chemical bond of hard-machining materials, such as CFRP, diamond and tempered glasses. We report the latest results of material processing by 193nm high power DUV laser.