CW DUV CW DUV LASER WITH IMPROVED STABILITY

摘要

Deep ultra-violet (DUV) continuous wave (CW) lasers are basic CW lasers configured to generate fundamental frequencies with corresponding wavelengths between about 1 μm and 1.1 μm, third harmonics and optional second order A third harmonic generator module including one or more periodically polled non-linear optical (NLO) crystals generating harmonics, and one of a fourth harmonic generator module and a fifth harmonic generator module . The fourth harmonic generator module includes a cavity that resonates at a fundamental frequency configured to generate a fourth harmonic by combining a fundamental frequency and a third harmonic. The fourth harmonic generator module is a cavity that resonates at a fundamental frequency configured to generate a fifth harmonic by combining a fundamental frequency and a third harmonic, or a second harmonic configured to generate a fifth harmonic by combining a second harmonic and a third harmonic It includes a cavity that resonates at frequency.