Using non-traditional etching techniques, it is possible to fabricate diffractive/refractive calcium-fluoride (CaF_(2)) micro-optics for deep-UV excimer laser systems that can increase the lifetime and reduce the servicing time of these systems. In the world of ultraviolet (UV) photonics, system engineers are looking to micro-optics to solve some complex problems in the industry. Micro-optic components or array optics such as diffractive optical elements (DOEs), microlens arrays (MLAs), or more general refractive optical elements (ROEs) as well as hybrids of those, are enablers for many applications such as beam shaping for materials processing and pattern generation for illumination and semiconductor metrology.
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