The influence of the ion plasma flow on the phase composition and microhardness of carbon coatings doped with metals

摘要

The Raman spectroscopy method established that subsequent treatment with ion ions leads to a change in the microstructure of coatings based on carbon and metals. It is established that the structure change is determined by the changes occurring at the interface and depends on the sp3 → sp2 phase transition due to the appearance of local thermal peaks at the end of tracks of nitrogen ions implanted in the coating volume. It is shown that the microhardness of metal-carbon coatings (a-G: Cu, a-C: Ti, a-C:Al) increases after ion-plasma treatment, which is determined by the formation of solid interstitial phases based on CNx and metal carbonitrides.