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Opto-electronic and morphological alteration in SnO_2/Au/SnO_2 thin film as a result of 120 MeV Ni~(10+) irradiation for TCE application

机译:作为TCE应用的120 meV Ni〜(10+)照射,SnO_2 / Au / SnO_2薄膜的光电和形态学改变

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Herein, the study of electrical and morphological properties of SnO_2/Au/SnO_2 thin film is presented. The stacked multilayers were deposited on Si (100)/SiO_2 substrate by e-beam evaporation using standard SnO_2 and Au targets to get a total thickness of ~75 nm. Aluminum mask was used to create an interface between pristine and 120 MeV Ni~(10+) irradiated (fluence-1×10~(12) and 5×10~(12) ions/cm~2) region. Irradiation resulted in an increase in roughness of film from 1.21 nm to 3.03 nm. The current-voltage characteristics taken at pristine irradiated and at the interface of the pristine-irradiated region showed ohmic behavior with the interface showing better conductivity. Hall measurements show decrease in electrical resistivity from 2.2 × 10~(-4) Ω-cm to 1.04 × 10~(-4) Ω-cm post irradiation for films irradiated with 120 MeV 10~(12) Ni~(10+) ions/cm~2. The optical study shows a decrease in transparency (80.97% to 78.56%) and increases in refractive index post irradiation. The possible mechanism for morphological and optoelectronic variation in the irradiated region is discussed in the manuscript.
机译:这里,提出了SnO_2 / Au / SnO_2薄膜的电和形态学性能的研究。通过使用标准SnO_2和Au靶蒸发通过电子束蒸发在Si(100)/ SiO_2基板上沉积堆叠的多层,以获得〜75nm的总厚度。铝掩模用于在辐照的原始和120meV Ni〜(10+)之间产生界面(流量-1×10〜(12)和5×10〜(12)离子/ cm〜2)区域。辐照导致薄膜粗糙度从1.21nm到3.03nm的增加。在原始辐照区域的原始曝光和在原始辐射区域的界面处的电流电压特性显示出欧姆的行为,界面显示出更好的导电性。霍尔测量结果显示电阻率从2.2×10〜(-4)Ω-cm至1.04×10〜(-4)ω-cm辐照辐照,薄膜用120 mev 10〜(12)ni〜(10+)离子/ cm〜2。光学研究表明透明度降低(80.97%至78.56%),折射率辐照折射率增加。在稿件中讨论了辐照区域中的形态学和光电变化的可能机制。

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