Structure and Mechanical Properties of (CrAl)N and (CrAlSiY)N Coatings Prepared by Asymmetrical Bipolar DC Magnetron Sputtering

摘要

Composite (CrAl)N and (CrAlSiY)N hard coatings were deposited on 1Cr11Ni2W2MoV steel substrates by arc ion plating system under negative bias of 0 V, 100 V and 200V respectively. Pulsed bias gave rise to the deviation of elements, the decreased deposition rate, and the change of the preferred orientation, the crystalline refining, the dense structure and improved hardness. The doping with small amount of Si and Y did not change the phase structure, but (CrAlSiY)N coatings possessed higher hardness value than (CrAl)N coatings in case of the same deposition parameters. The harder coatings exhibited the lower toughness and the lower scratch critical load (Lc).