Sizing Optimization of Microactuaor In-plane Based on Ansys Workbench

摘要

One new type piezoeletric microactuator was designed in this paper, in order to improve the output characteristic of microactuator mechanism, piezoeletric analysis was performed and the optimization model was built with W_b and a as design variables, the maximal output horizontal-plane displacement and the minimum vertical-plane displacement as objective. The final optimize result shows that the output horizontal-plane displacement of microactuator raises twice from 0.3μm to 0.6μm, meanwhile, the output vertical-displacement decreases from 0.093μm to 0.075μm by approximately 21 percent, the horizontal output characteristic has a remarkable improvement, so the optimal result can provide validity theoritical guidance for coming design strategy.