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Laser Forward Transfer of Solder Paste for Microelectronics Fabrication

机译:用于微电子制造的焊膏激光前进转移

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The progressive miniaturization of electronic devices requires an ever-increasing density of interconnects attached via solder joints. As a consequence, the overall size and spacing (or pitch) of these solder joint interconnects keeps shrinking. When the pitch between interconnects decreases below 200 μm, current technologies, such as stencil printing, find themselves reaching their resolution limit. Laser direct-write (LDW) techniques based on laser-induced forward transfer (LIFT) of functional materials offer unique advantages and capabilities for the printing of solder pastes. At NRL, we have demonstrated the successful transfer, patterning, and subsequent reflow of commercial Pb-free solder pastes using LIFT. Transfers were achieved both with the donor substrate in contact with the receiving substrate and across a 25 μm gap, such that the donor substrate does not make contact with the receiving substrate. We demonstrate the transfer of solder paste features down to 25 μm in diameter and as large as a few hundred microns, although neither represents the ultimate limit of the LIFT process in terms of spatial dimensions. Solder paste was transferred onto circular copper pads as small as 30 μm and subsequently reflowed, in order to demonstrate that the solder and flux were not adversely affected by the LIFT process.
机译:电子设备的逐步小型化需要通过焊点所连接的互连密度不断增加。因此,这些焊接接头互连的整体尺寸和间隔(或间距)不断缩小。当互连之间的间距降低200μm时,当前技术(如模版印刷)发现自己达到其分辨率限制。基于激光引起的激光诱导的正向转印(升降机)的激光直接写入技术为焊膏印刷提供独特的优势和能力。在NRL,我们已经证明了使用升降机的成功转移,图案化和随后的商业PB免焊膏回流。通过与接收基板接触的供体基材和25μm间隙均达到转移,使得供体基板不会与接收基板接触。我们证明了直径下降至25μm的焊膏特性的转移,大约几百微米,尽管在空间尺寸方面也不代表升力过程的最终极限。将焊膏转移到小于30μm的圆形铜焊盘上并随后回流,以证明焊料和助焊剂不会受到提升过程的不利影响。

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