Fabrication of Polydimethylsiloxane (PDMS) - Based Flexible Electrode Array for Improving Tissue Contact

摘要

Flexible planar multi-electrode array (MEA) that can record biological signals have been able to be minimized in size with advancement of micro-electro-mechanical systems (MEMS). In case of applying the conventional electrode fabrication method to small MEA, electrode surface is being positioned lower than insulation surface, thus this structure make an empty space between the electrode and tissue. This will make a gap between electrodes and tissues, and the recording signal quality degrades. Electroplating can eliminate an empty space above the electrode, but PDMS-based MEA damaged easily, because its vulnerability to external physical force. In this paper, the PDMS and gold are used as the materials of the MEA, and we propose a new fabrication process. And, which can eliminate the trench on the electrode, and this enables electrode to be closely contacted to tissue.