Dielectric Breakdown in Electrowetting-Based Liquid Microactuators

摘要

In an electrowetting-based liquid microactuator, two types of insulating materials are used for device operation: an dielectric material to provide capacitance between the liquid and conductor, and a hydrophobic coating at the interface of liquid and insulator. This paper investigates important physical properties for the insulating materials. Several alternative dielectric materials are compared for application in EW chips, breakdown phenomenon of insulating layers with different thicknesses is tested before and after droplet actuation. It appears that the used EW devices have lower breakdown voltages than unused devices, probably due to the locally trapped charges in the insulating layer.