Design of MEMS based MWCNT/Epoxy Strain Sensor Using ANSYS

摘要

This paper entails the study and simulation of a MEMS based MWCNT/Epoxy strain sensor using ANSYS CAE software. The proposed sensor design comprises of freestanding SU-8 based U-shaped cantilever beam integrated with MWCNT/Epoxy piezoresistors as an active elements. MWCNT/Epoxy thin film composite has been deposited at the cantilever fulcrum (anchor) point as a piezoresistors. Analytical simulations have been performed by applying a given load at the tip of the U-shaped cantilever to record its deflection and locate the regions of maximum/minimum stress and strains. These results are then interpreted to understand the sensitivity of the device.