基于MEMS的航天器表面新型测温传感器设计与实现

摘要

为满足返回式航天器再入过程中瞬态高温的测量需求,文章基于微机械电子系统(Micro-Electro Mechanical Systems,MEMS)技术设计了一款新型表面瞬态测温热电偶传感器;该型测温传感器结构设计采用便于安装且与被测物表面易于接触的针型结构,并选用K型(NiCr-NiSi)热电偶材料作为传感器热电极,对传感器热电偶热结点及其引线设计、制作工艺进行研究,并采用磁控溅射技术实现了传感器测温端面热接点及其引线的制备;最后,采用自行设计的基于LXI总线的测温传感器性能测试系统对该型测温传感器进行了物理试验验证,结果表明该型薄膜热电偶相比普通热电偶,能够更好地与被测物表面有效贴合,测量温度可高达800℃,响应时间较短,相对误差小于0.5％,能够很好地应用于返回式航天器表面高温的瞬态测温.%In order to meet the measurement requirements of transient high temperature during the reentry process of the recoverable spacecraft,a new style of thin film thermocouple sensor based on the technology of MEMS is designed.Firstly,the structure design of this style temperature sensor adopts a needle type structure which is easy to install and contact with the surface of the object.The K-type (NiCr -NiSi) thermocouple material is selected as the thermode of sensor.Secondly,the design and fabrication process of the thermal junction and its leads are studied,and the operationon the top of the sensor are implemented by magnetron sputtering technology.Finally,the thin film thermocouple sensor is verified by the test system based on LXI bus.The test shows that the thin film thermocouple sensor can contact with the surface of the object better than the traditional temperature sensor,the measuring temperature can be more than 800℃ and the response time is shorter.The relative error is less than 0.5％ and can be applied to the transient temperature measurement of the surface of a return spacecraft well.