A New Grating Displacement Measuring Method for Improving Resolution

摘要

A new method for improving resolution of displacement measuring system is developed in this paper. The core parts of the system is a grating interferometer and a phase-shift device. Moving the photoelectric sensor, between the two interference fringes, the signal phase of the interference fringe will be changed. The method leads to higher resolution in theory than that with laser interferometer. Experiments with the method are made in a positioning system and the' results show that the new displacement measuring method will improve the positioning accuracy about 16%.