The optimisation of iron oxide discrimination on a QEMSCAN - current best practice

摘要

The optimization of iron oxide discrimination on a QEMSCAN system is explored through the systematic testing of measurement and analysis parameters. Specifically the influence of backscatter electron (BSE) stabilizers (also known as BSE amplifiers), gun alignment, magnification field sizes and Mg/Ca solid solution in iron oxides is studied. Furthermore, the effect of stage height focus versus beam focus is compared and contrasted. Novel measurement parameters are presented that improve iron oxide distinctions including appropriate 3rd point BSE calibration standards and increased beam dwell times. Lastly, a particle characterization mechanism that uses a de-convoluted iron oxide dilation erosion procedure is introduced.