Differential cross section in PIC-MCC simulation of plasmasolid interaction

摘要

This paper focuses on the particle modelling of the interaction of low-temperature plasma with immersed cylindrical Langmuir probe. Particle modelling gives comprehensive information about the system, which is being analyzed, but the simulations are highly timeconsuming. Especially in the high-pressure plasma the interactions between charged and neutral particles play an important role and they are often simulated by the Monte Carlo method. For this paper we prepared a simulation, which contains these interactions in as accurate way as possible, including the angular dependence of the electron-neutral elastic collision. We showed the effect of neglecting this angular dependence as well as the energy dependences of the cross sections of all included interactions.