Monte Carlo simulation of a sputtering hollow-cathode discharge for laser applications

摘要

We report on a kinetic model that computes the electron behaviour in a hollow cathode discharge. It is a part of the PLASIMO toolkit and is based on a Monte-Carlo technique. The model is tested by varying the input parameters and by comparing the output with the output obtained by the freeware Boltzmann equation solver BOLSIG+. The results show that the Monte-Carlo model gives reliable information about the behavior of the electrons in the discharge. The Monte-Carlo module is applied to the case of a hollow cathode discharge for laser applications. Analysis of the output data and its adequateness is done. Future developments of the model are discussed.