PICO-METER METROLOGY FOR THE PRIMARY VIBRATION CALIBRATION

摘要

This paper introduces the use of a homodyne differential plane mirror interferometer (HDPMI) for development of the primary vibration calibration system. The zero-drift test results showed that it enables displacement measurement in a scale of 10 pico-meters could be feasible. The HDPMI model was shown to be quite successful for the primary vibration calibration even in the frequency range of 5 kHz to 20 kHz. The standard uncertainty of the complex sensitivities from 5 kHz to 20 kHz was to be less than 0.46 % for their moduli and 0.57° for the phase shifts.