Dielectric and Structural Properties of RF Magnetron Sputter Grown Lead Zirconium Titanate Thin Film: A Review

摘要

This review summarizes the current state of lead zirconium titanate (PZT) that used for energy storage based organic capacitor. The particular focus is on dielectric material PZT properties for achieving high-k dielectric constant (900-1300) concerning for DC power application. PZT is well known of its perovskite structure that related to excellent ferroelectric properties considered to have high remnant polarization and low coercive field. We review the recent literature that focused on the annealing process that affects dielectric constant and its structural property derived by radio frequency (RF) magnetron sputter.