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Practical electrical contact resistance measurement method for bulk thermoelectric devices

机译:散装热电装置实用电接触电阻测量方法

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As thermoelectric (TE) element length decreases, the impact of contact resistance on TE device performance grows more significant. In fact, for a TE device containing 100-μm tall Bi2Te3TE elements, the figure of merit ratio (ZT_(Device)/ZT_(Material)) drops from 0.9 to 0.5 as the contact resistivity increases from 5 × 10~(-07) to 5 × 10~(-06) Ω-cm~2. To understand the effects of contact resistance on bulk TE device performance, a reliable experimental measurement method is needed. There are many popular methods to extract contact resistance such as Transmission Line Measurements (TLM) and Kelvin Cross Bridge Resistor method (KCBR), but they are only well-suited for measuring metal contacts on thin films and do not necessarily translate to measuring contact resistance on bulk thermoelectric materials. The authors present a new measurement technique that precisely measures contact resistance (on the order of 5 × 10~(-07) Ω-cm~2) on bulk thermoelectric materials by processing stacks of bulk, metal-coated TE wafers using TE industry standard processes. One advantage of this technique is that it exploits realistic TE device manufacturing techniques and results in an almost device-like structure, therefore representing a realistic value for electrical contact resistance in a bulk TE device. Contact resistance measurements for metal contacts to n- and p-type Bi2Te3 alloys are presented and an estimate of the accuracy of the measurements is discussed.
机译:热电(TE)元件长度减小,接触电阻对TE器件性能的影响变得更显著。事实上,对于含有100微米高Bi2Te3TE元件的优点比图中的TE装置(ZT_(设备)/ ZT_(材料))下降0.9至0.5如从5×10〜(-07)的接触电阻率增加到5×10〜(-06)Ω-cm〜2的。为了理解电阻上散装TE装置性能的接触的影响,需要一种可靠的实验测定方法。有许多流行的方法来提取物的接触电阻,如输电线路测量(TLM)和Kelvin跨桥电阻器的方法(KCBR),但它们仅非常适合用于测量薄膜的金属接触,并且不一定转化成测量接触电阻上块体热电材料。作者提出一个新的测量技术,它精确地测量接触电阻​​上散装热电材料(5×10〜(-07)Ω-cm〜2的数量级上),通过使用TE工业标准批量加工,金属涂覆的TE晶片的堆叠流程。该技术的一个优点是,它利用了现实TE装置的制造技术,并导致几乎设备状结构,因此代表用于在散TE装置的电接触电阻的现实价值。接触电阻的测量对金属接触到n型和p型的Bi2Te3合金呈现和测量的准确度的估计进行了讨论。

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