Study of properties of SiC layer in TRISO coated particles grown using different Alkyl-Silicon Compounds

摘要

The silicon carbide (SiC) layer used for the formation of Tri-isostatic (TRISO) coated fuel particles is normally produced at high temperatures via fluidized bed chemical vapor deposition from methyltrichlorosilane (MTS) in a hydrogen environment. In this work, we show the deposition of uniform SiC layers using different organosilicon precursors such as MTS and hexamethyldisilane (HMDS) via spouted bed chemical vapor deposition. From the X-ray diffraction pattern it could be inferred that the SiC deposits obtained through different precursors have the β-SiC phase. The microstructure and mechanical properties of the fabricated SiC coating were studied. The hardness and fracture toughness of the fabricated SiC coatings using MTS and HMDS were nearly the same and close to the theoretical value for pure silicon carbide.