Data-processing strategies for nano-tomography with elemental specification

摘要

Combining the energy tunability provided by synchrotron X-ray sources with transmission X-ray microscopy, the morphology of materials can be resolved in 3D at spatial resolution down to 30 nm with elemental/chemical specification. In order to study the energy dependence of the absorption coefficient over the investigated volume, the tomographic reconstruction and image registration (before and/or after the tomographic reconstruction) are critical. We show in this paper the comparison of two different data processing strategies and conclude that the signal to noise ratio (S/N) in the final result can be improved via performing tomographic reconstruction prior to the evaluation of energy dependence. Our result echoes the dose fractionation theorem, and is particularly helpful when the element of interest has low concentration.