Fabrication and Performance Evaluation of Pixelated Nano-wire Grid Polarizer

摘要

Metal-based nano-wire grid polarizer (NWGP) is widely used in division of focal plane (DoFP) imaging sensors to capture polarization information of the imaged environment. In this paper, we present a procedure for fabricating aluminum pixelated NWGP structures using electron beam lithography (EBL) and reactive ion etching (RIE). We evaluate optical performance of the NWGP structures in terms of different orientations (0°, 45°, 90°, 135°), line widths (50nm to 500nm), and spectral response (460nm to 625nm).