Multi-Component Oxide Thin Films and Heterostructures for Electronics: Growth Principles

摘要

In the last years oxide materials for electronics show significant progress. However, many details regarding technology control of the properties have to be solved. For electronics, thin films and heterestructures are important taking advantage of integration and synergetic concepts leading to new types of devices and functionalities. It is notable that, while fabrication of new devices and materials showing new phenomena are booming, the growth principles and concepts are somehow developing slowly within this general trend. This is because in many cases, growth of materials is very personalized. Understanding of the bi-directional relationship between the general and particular principles deserves attention. The immediate benefit is that knowledge on growth for one material can be transferred to another one. In our work we have analyzed such relationships for some oxide multicomponent perovskites. Materials used in our examples are Bi-Sr-Ca-Cu-O and YBa_2Cu_3O_7, (Ca, Sr)CuO_2, (Ca, Ba)CuO_2 and Bi_4Ti_3O_(12). Presented thin films or heterostructures are with c-axis and non-c-axis orientations and based on these examples we discuss some of the growth principles.