Piezoresistive Acceleration Sensor with High Sensitivity and High Responsiveness

摘要

In this work, a new-type piezo-resistive acceleration sensor with a slit in the beams is proposed to improve sensitivity by reducing the twisting of the beams. Experimental results demonstrated that the new-type acceleration sensor has about 3.5 times higher than that of the conventional acceleration sensor without the slit. Furthermore, resonant frequency of the new-type sensor increases to about 5 kHz by a factor of 25, compared with commercial acceleration sensor.