Investigation of Loading-Unloading Curve and Stress Distribution of Thin Hard Coating by Finite Element Analysis during Nanoindentation Process

摘要

This study applies the finite element method (FEM) in conjunction with an nanoindentation test to predict the loading curve and stress distribution of thin hard coatings. To verify the prediction of FEM simulation for loading and unloading process, the experimental data are compared with the results of current simulation. Loading curve is investigated for different material parameters, such as elastic modulus E, yield stress Y0 and tangent modulus ET of nanoindentation process, by finite element analysis. The effects of material properties of thin film on the stress distribution for loading and unloading in the nanoindentation are also investigated. Therefore, the loading curve and stress distribution will be prediction for the different material parameters of nanoindentation process.