High Performance Transparent Conducting Sb-doped SnO2 Films Fabricated by Spray Pyrolysis

摘要

Sb-doped SnO_2 (ATO) films were successfully prepared by the spray-pyrolysis method with SnCl_2·2H_2O and SbCl_3 as precursors. The structural, surface morphological, electrical and optical properties of the films were studied in details. The results indicated that all films consisted of tetragonal cassiterite SnO_2 with preferred orientation along (110) and (200) crystal plane. A minimum resistivity as low as 1.59x10~(-3) Ω·cm has been achieved. The infrared emissivity of the films on the surface of glass was ca. 0.36, which presents potential application in the low-emission window and building ceramics.