Ergonomics in Semiconductor Wafer Manufacturing

摘要

In semiconductor wafer manufacturing, there are only a few processes but many steps. Each wafer must go through the processes multiple times (steps) and sometimes not in the same sequence. All the wafers in lot size of 25 pieces are transferred between the processes using an Automated Guided Vehicle from stacker to stacker. Then, the wafers are manually transferred to the processing tool. Although the tools are designed per SEMI S2/S8 standards [1,2], the equipment technician can get into awkward postures when performing the preventive maintenance. Both the manual material handling between the tools and awkward postures during preventive maintenance can pose an ergonomic challenge. However, some techniques can be used to minimize the impact. This paper shares the techniques which can ease ergonomic problems in semiconductor wafer manufacturing