Research on the process of (Ti, Cr)N by multi-arc ion plating and Microstructure of composite films

摘要

In this study, the (Ti, Cr)N composite films were deposited on 4Cr13 martensitic stainless steel by multi-arc ion plating(MAIP), researched the composition, morphology and micro-hardness of (Ti, Cr)N composite films by the method of changing the current of Cr target and Ti target. The result show that: with the acr current increasing, the Cr content of (Ti, Cr)N composite films increased, the Ti content decreased, the number and size of droplets decreased, and the hardness of composite films increased first, then decreased. When the acr current was 70A, the hardness reached the maximum. At the same time, the phases of composite films changed when the Cr content increased. When the value of X was 0.28, the phase of composite was TiN and when the value of X was 0.37 or 0.65, the composite films appeared the phase of CrN and Cr2N.