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Monitoring of Technological Conditions for Preparing DLC Films in Supersonic Flow of Hydrocarbon Plasma

机译：在烃类血浆超声波流动中制备DLC薄膜的技术条件监测

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摘要

Properties of diamond-like carbon films deposited by a new method in a supersonic flow of hydrocarbon plasma generated by a disk-type magneto-hydro-dynamic accelerator were studied. Three methods are used for optical and structural characterization of diamond-like carbon films: nondestructive spectroscopic ellipsometry, transmittance spectroscopy and Raman spectroscopy.

机译：研究了在由盘型磁力 - 液压动力学加速器产生的烃类等离子体的超声波流量中沉积的金刚石状碳膜的性质。三种方法用于金刚石碳膜的光学和结构表征：无损光谱椭偏针，透射光谱和拉曼光谱。

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《OEEM 2012》|2013年||共4页
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作者
S.N. Svitasheva; G.A. Pozdnyakov;
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正文语种
中图分类 71.22083;
关键词
MHD-accelerator of plasma; Spectroscopic ellipsometry; DLC-films properties;

机译：等离子体的MHD - 促进剂;光谱椭圆形;DLC薄膜性质;

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专利

1. Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow [J] . Fedoseeva Yu. V., Pozdnyakov G. A., Okotrub A. V., Applied Surface Science . 2016,第nova1期

机译：衬底温度对脉冲式超音速甲烷等离子体流生长的非晶态氧化烃膜结构的影响
2. Optical Properties and Morphology of Diamond-Like Films Obtained in a Supersonic Flow of a Hydrocarbon Plasma [J] . S. N. Svitasheva, G. A. Pozdnyakov, D. V. Sheglov, Optoelectronics, Instrumentation and Data Processing . 2011,第5期

机译：碳氢化合物超音速流动获得的类金刚石薄膜的光学性质和形貌
3. Plasma properties of a new surface-wave-sustained plasma source under the conditions of depositing DLC films [J] . Xu JQ, Kousaka H, Umehara N, Surface & Coatings Technology . 2006,第1a2期

机译：在沉积DLC膜的条件下新型表面波维持等离子体源的等离子体特性
4. Monitoring of Technological Conditions for Preparing DLC Films in Supersonic Flow of Hydrocarbon Plasma [C] . S.N. Svitasheva, G.A. Pozdnyakov International Conference on Optical,Electronic and Electrical Materials . 2013

机译：在烃类血浆超声波流动中制备DLC薄膜的技术条件监测
5. Characterization of Plasma Formation and Induced Flows of Nanosecond-Pulsed Dielectric Barrier Discharges for Use in Supersonic Flow Control [D] . Newnam, Kyle 2017

机译：用于超音速流控制的纳秒脉冲介电势垒放电的等离子体形成和诱导流的表征
6. Effect of Inlet and Outlet Flow Conditions on Natural Gas Parameters in Supersonic Separation Process [O] . Yan Yang, Chuang Wen, Shuli Wang, 2010

机译：超声分离过程中进，出口流动条件对天然气参数的影响
7. Optical and structural study for DLC thin films prepared by plasma jet [O] . S. J. Kadhem 2019

机译：等离子射流制备的DLC薄膜的光学和结构研究
8. Characterization and performance of DLC films synthesized by plasma and ion beam techniques [R] . Walter, K. C., Kung, H., Levine, T. 1994

机译：用等离子体和离子束技术合成DLC薄膜的表征和性能

Monitoring of Technological Conditions for Preparing DLC Films in Supersonic Flow of Hydrocarbon Plasma

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