Orientation and phase mapping in TEM microscopy (EBSD-TEM like): applications to materials science

摘要

EBSD is a well known technique that allows orientation and phase mapping using an SEM. Although the technique is very powerful, it has serious limitations related to a) the spatial resolution limited to 50nm (SEM-FEG) and b) the specimen preparation issues as it is hard to obtain Kikuchi signal from rough surfaces, non-conducting materials, heavily strained materials, nanoparticles etc.. To address those difficulties, a novel technique has been developed recently (EBSD-TEM like) allowing automatic orientation and phase mapping with tee help of a transmission electron microscope (TEM).