CHARGING SiO_2 AND CYTOP ELECTRET FILM BY Negative Ion generator Air Purifier Multiple-Ionizer FOR MEMS BASED ENERGY HARVESTING SYSTEMS

摘要

This paper reports a new type of charging electrets is presented. A new type of charging electrets is presented. Low cost equipment is used for charging. Extremely large potentials with very good long term stability have been achieved. This paper presents results of charging SiO_2 and CYTOP electret films by a so-called negative Ion generator. The highest charge density of 32.99 mC/m~2 for SiO_2 and 2.61 mC/m~2 for CYTOP have been achieved.