Capacitive Silicon-Microphone and its mechanical and electro-acoustical Properties

摘要

Si-based microphones are widely used in different domains such as consumer electronics, medical applications and automotive. Their small package size in combination with low power consumption at high sensitivity makes Si-microphones an ideal acoustic transducer to be used in smart phones. MEMS-technology enables a relatively simple manufacturing process, resulting in good electrical and acoustical performance at a comparably low price. A novel, all silicon-based MEMS microphone has been designed and developed at Fraunhofer EMFT in collaboration with industry partners and the Munich University of applied Science. The completed device consists of a capacitive microphone and an appropriate ASIC chip within a single package. The main focus of the development was the possible miniaturization of the microphone's membrane size.