Structure and Magnetic Properties of Nd-Fe based films deposited with Supersonic Free-Jet PVD

摘要

Supersonic Free-Jet Physical Vapor Deposition (SFJ-PVD) has been developed as a new coating method in which a coating film is formed by the deposition of nanoparticle onto a substrate at very high velocity. The SFJ-PVD can deposit almost all of an evaporated source material as nanoparticles and produce a thick coating film. We applied the SFJ-PVD to produce thick and high-density magnetic coating with nanostructure composites. In this present study, Nd-Fe based magnetic coating films are produced by the SFJ-PVD. We succeeded in obtaining a uniform several tens micron meter-thick, high-density nanocomposite Nd-Fe based coating films on Al substrate with nanostructure composites.