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An Automatic Vision System using Optical Scanning Mechanism with Near-infrared Optics for Solar Cell Wafer

机译：一种自动视觉系统，采用光学扫描机构，用于太阳能电池晶圆近红外光学

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摘要

In this paper, an automatic vision system based on optical scanning mechanism is developed for solar cell wafer. It consists of optical scanning mechanism with near-infrared(NIR) camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system(SHIS). It is used to inspection of surface defects. Also, NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that the automatic inspection system give satisfactory performance for micro defects in solar cell wafer.

机译：本文为太阳能电池晶片开发了一种基于光学扫描机构的自动视觉系统。它由具有近红外（NIR）相机光学，机械和控制系统，缺陷检测和软件算法的光学扫描机构组成。光学扫描机构由几何相机光学和结构化混合照明系统（SHIS）组成。它用于检查表面缺陷。此外，NIR Camera Modics用于检查太阳能电池晶片内的缺陷。结果表明，自动检测系统对太阳能电池晶片中的微缺陷提供了令人满意的性能。

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《International Conference on Pervasive and Embedded Computing and Communication Systems 》|2014年||共4页
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作者
Gyung-bum Kim;
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原文格式 PDF
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中图分类 TN91-53;
关键词
Optical Scanning Mechanism; Solar Cell Wafer; Surface Inspection System; Near-infrared Optics;

机译：光学扫描机构;太阳能电池晶片;表面检测系统;近红外光学;

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4. An Automatic Vision System using Optical Scanning Mechanism with Near-infrared Optics for Solar Cell Wafer [C] . Gyung-bum Kim International Conference on Pervasive and Embedded Computing and Communication Systems . 2014

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An Automatic Vision System using Optical Scanning Mechanism with Near-infrared Optics for Solar Cell Wafer

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