Study on the Experimental Preparation of the SiO-2 Minus Reflection Film of the Solar Spectrum Selective Absorption Coating

摘要

In order to meet the applications of the solar power air-conditioning, solar power generation and in the high-end flat plate collector domestic market and architecture, the study on the middle-high temperature solar selective absorption coating has attracted people's attention. In this paper, SS-N-O and SiO_2 were used as the absorption and the minus reflection film. The high-performance middle-high temperature flat solar selective absorption coating with excellent optical properties (absorption ratio was greater than 0.92 and the launch ratio was less than 0.09), strong oxidation resistance and weather resistance was prepared by the use of magnetron sputtering technique. By controlling the process parameters and the experimental tests of the optical properties, a good performance SiO_2 minus reflection film was obtained, and then combined it with SS-N-O to form a relatively inexpensive gradient coating which could meet the relevant performance requirements. The experimental results show that: in the conditions of that the vacuum degree was 2.8 × 10~(-3) Pa, sputtering voltage was 268 V, argon gas flow was 4.0 sccm, oxygen flow rate was 0.7 sccm and the sputtering current was 1.3 A, borosilicate glass 3.3 was used as a carrier, the SiO_2 minus reflection film which reflectance and transmittance were respectively 0.121 and 0.740 was obtained by 30 minutes of stable magnetron sputtering. This minus reflection film was combined well with the gradual double-layer absorption film SS-N-O, and the absorption rate was increased by 0.049.