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Modeling and Validation of Ultra Precision Positioning System

机译:超精密定位系统的建模与验证

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Base on the significance of understanding research objects, modeling and validation of ultra precision positioning system is studied in this paper. Taking different reduction methods of leaf springs into consideration, a rigid body model and an elastic body model has been developed. Identifying unknown parameters by the least square method, the validation results of two models are compared. The conclusion indicates that the elastic body model is better when the dynamic characteristics of the positioning system before the stable state are concerned and the rigid body model is more appropriate if the accuracy of the whole model is focused.
机译:基于理解研究目的的重要性,本文研究了超精密定位系统的建模和验证。采用不同的叶片弹簧的减少方法考虑,已经开发了一种刚体模型和弹性体模型。通过最小的方形方法识别未知参数,比较了两个模型的验证结果。结论表明,当在稳定状态的定位系统的动态特性和刚体模型聚焦的精度集中时,弹性体型更好。

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