Semiconductor tool monitor by integrating defect signatures and in-line WIP

摘要

• Klarity SSA can detect Defect Signature on Tool Monitor and Product Wafers • With SSA, Klarity Defect can effectively monitor near realtime signature related excursions in production line • By Integrating with WIP data, Klarity SSA enables Tool Monitoring • This Logic Fab uses integrated WIP and Klarity SSA to successfully control excursions and identify opportunities for baseline Yield improvement.