New method of particle management by high-sensitivity ISPM

摘要

• The particles condition was able to be understood more precisely by using the new ISPM. • When there are exchange parts, the in-situ cleaning to emphasize gas viscosity can be effective • The in-situ cleaning condition be optimized by using the new ISPM. • In conclusion, one of the keys to achieve the particle management is using high-sensitivity ISPM.