Development of a Multi-quantum-well Spatial Light Modulator and Its Nonlinear Electro-optical Driving Circuit

摘要

A Multi-quantum-well (MQW) spatial light modulator (SLM) was developed and tested. The test results shows that CR could reach 1.7, the swing of driving voltage is 1.5 under the conditions of room temperature while the wavelength is 847.6nm, and the CR could reach 5.1, the swing of driving voltage is 3.2 under the conditions of the temperature of -15.4°C while the wavelength is 846nm. A programmable driving circuit is also developed to aim at this SLM. The chip of this driving circuit, with 64×64 array, adopted the 0.35μm CMOS technique. The test results show that, the resolution of driving voltage is alterable and could up to 256-level with only 65*65μm~2 pixel estate. The driving voltage swing is from 0 to V_(DD). It could be flip-chip bounded with Multi-quantum-well (MQW) spatial light modulator (SLM). The driving circuit meets all the requirements of the Multi-quantum-well (MQW) spatial light modulator (SLM).