多量子阱空间光调制器的驱动电路研制

摘要

A universal programmable Multi-quantum-well(MQW) spatial light modulator(SLM) driving circuit is developed in this paper.With a twice scanning,the programmable signals are generated to drive non-linear MQW SLM by using a software preprocessing unit.By adjusting the switching network of the driving circuit,the switching noise is reduced and the output preci-sion is improved.The chip test results show that the driving voltage call swing from 0 to VDD,and its resolution can be close to 256 with only 65 μm×65 μm pixel estate.%研制了一种通用可编程的多量子阱空间光调制器驱动电路.该电路利用软件预处理单元产生非线性光电转换控制信号,采用先粗扫再细扫的二次扫描方式,在保证扫描速度及分辨率的同时,有效降低像素单元电路的面积.通过调整驱动电路开关网络结构,减小了开关噪声,提高了输出精度.采用0.35μm CMOS模拟工艺,完成了64×64阵列的多量子阱空间光调制器驱动电路的版图设计及流片.测试结果显示,芯片可以很好地工作,驱动电压摆幅为0～VDD,驱动电压分辨率可调,最高至256级,单个像素版图面积仅为65 μm×65μm,可以与多量子阱空间光调制器倒装在一起,满足多量子阱空间光调制器对驱动电路的要求.