Al Ion Implantation of SiC Coated Carbon Fiber-reinforced SiC Matrix Composites by Metal Vapor Vacuum Arc Ion Source

摘要

SiC coated carbon fiber-reinforced SiC matrix (C/SiC) composites were implanted with aluminum ions by metal vapor vacuum arc ion source to improve their oxidation resistance. Depth profile of the aluminum ions in the SiC coated C/SiC composites was checked by Auger electronic energy spectrum. Oxidation tests were performed in flowing dry air at 1300°C on the SiC coated C/SiC composites. The samples with ion implantation exhibited lower weight loss than those without aluminum ion implantation. The surface morphologies of the samples were obtained by scanning electronic microscope. As compared with the mechanical properties of the samples without ion implantation, those of ion-implanted samples changed little.