Component-based Modelling and Revising Method for Micro Device

摘要

The top-down design method is effective to improve the designing efficiency of micro device. The manufacturability of the derived physical level model is the key point for the designing flow. A method to optimize the fabricating information of micro device from a feature-based design model is presented. The component-based constructing method involves functional components mapping, template based designing and 3D features constructing technique. Along with the designing flow, the vertical and horizontal parameters of the original model are revised by the key enabling technologies that are introduced briefly. With cooperative design mode, the process model derivation and optimization are accomplished simultaneously. This work provides designer a more intuitive way to design product by means of process verification to improve manufacturability.