In-plane Strain Field Sensor Based on the Semiconductor Film

摘要

The ZnO semiconductor multicrystalline film is utilized as the sensing material, and a sensors array is demonstrated in this paper. Based on the coupling effect of piezoelectric and semiconducting, an ultra-high sensitivity to the deformation is obtained that the gauge factor of the single units is derived up to 199, which is 100 times of that of the commercial foil gage (gauge factor= 2). After calibration on every sensing unit, the distribution of the uniform and non-uniform strain applied on the device is measured and mapped by the sensors array successfully. The results show a good application of the device on the deformation field sensing by contact test method.