Research of Temperature Compensation Methods on High Accuracy Pressure Sensors

摘要

The temperature characteristics of semiconductor will make the zero point and sensitivity of the piezoresistive pressure sensor drift with the temperature,that is the main factor of the measurement error caused by pressure sensor.For high precision pressure detecting system, temperature drift has become the important obstacles when needing to increase the performance of the system, especially in the domain where the environment temperature changes greatly . Based on comparing the advantages and disadvantages with other methods ,this paper puts forward a kind of temperature compensation method which combines polynomial curve fitting and cubic spline interpolation, it can improve the performance of the system well.