Research on the forming mechanism of micro-moulds based on laminated slip-welding of ultrathin stainless steel foils

摘要

To address the mainstream technology of UV-LIGA combined with micro-electroforming which could only fabricate micro-moulds cavity with vertical wall structure and low depth-to-width ratio, a new forming process based on femtosecond laser combined with laminated slip-welding was proposed in the paper. The forming process was achieved through experiment and it proved that the forming process could be a useful method for the process of micro-moulds with high depth-to-width ratio and complex structures.