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Design and Research on Light Sources in a White Light Interferometer

机译:白光干涉仪光源的设计与研究

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In a white light interferometer, the parameters of white light sources determine the distribution of interference fringes, and exert a direct impact on the identification accuracy of central fringes. For the white light interferometer which uses synthesized sources constituted by multiple broadband sources, its interference signals are a superposition of signals interfered by a single source, so as to cause the redistribution of the interference signal intensity. In order to more accurately determine the location of zero-order central fringes, improve the systemic resolution, and reduce the requirements of the signal-to-noise ratio of the system, the optimal wavelength combination needs to be determined. This article proposed a method to optimize the parameters of light sources. Through the theoretical analysis, it obtained simple formulas of the optimal wavelength combination, and put forward the examples of the related numerical simulations. The computer simulation results show that, in the interferogram generated after the light sources are optimized, the visibility of its zero-order fringes increases, which is more conducive to improving the measuring accuracy of the system.
机译:在白光干涉仪中,白光源的参数决定了干涉条纹的分布,并对中央条纹的识别精度产生直接影响。对于使用由多个宽带源构成的合成源的白光干涉仪,其干扰信号是由单个源干扰的信号的叠加,从而导致干扰信号强度的重新分布。为了更准确地确定零阶中心条纹的位置,提高系统分析,并降低系统的信噪比要求,需要确定最佳的波长组合。本文提出了一种优化光源参数的方法。通过理论分析,它获得了最佳波长组合的简单公式,并提出了相关数值模拟的示例。计算机仿真结果表明,在优化光源的干扰图中,其零级条纹的可见性增加,这更有利于提高系统的测量精度。

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